在CMOS中建構MEMS:一個不可能實現的夢想?

作者 : Sally Ward-Foxton,EE Times Europe特約編輯

感測器新創公司有個雄心勃勃的技術目標:打造可靠、便宜,可與其介面ASIC建構在同一晶片上的CMOS微機電系統(MEMS)元件,節省的空間將足以改變消費類電子產品的遊戲規則。但從技術上分析,在CMOS中建構MEMS應該是不可能的…

總部位於倫敦和巴賽隆納的歐洲新創公司Nanusens有一個雄心勃勃的技術目標:打造可靠、便宜,可與其介面ASIC建構在同一裸晶上的CMOS微機電系統(MEMS)元件,節省的空間將足以改變消費類電子產品的遊戲規則。

在CMOS中建構MEMS應該是不可能的。CMOS並不是為機械結構設計,它的特性至少比現有MEMS感測器結構小一個數量級,而且金屬層非常薄。簡單粗暴地縮小現有MEMS設計並不能解決這個問題,例如經典的、彈簧上的梳齒狀品質塊(proof mass)。

Nanusens執行長Josep Montanyà說:「(結構上的)高應力梯度意味著,一旦透過蝕刻釋放金屬,矽氧化物會大量捲曲,所以結構不是平整的。」

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內建於CMOS製程後端的MEMS元件橫截面圖。(圖片來源:Nanusens)

「用這些捲曲的金屬製造有用的元件是一個巨大的挑戰,因為除此之外,縫隙非常小,金屬層非常薄。這對慣性感測器來說是另一個挑戰,因為通常需要一個大的品質塊,而薄層材料很難做到這一點。」

在傳統的MEMS製程中,矽可能有40微米(µm)厚,但在0.18微米製程中,典型的CMOS層厚度小於1微米。可以利用多層CMOS材料來製造盡可能大的品質塊,但是在CMOS規格下刻蝕一個典型的品質塊形狀,會導致結構高度扭曲。由於高應力梯度,曲率半徑很小。在大範本上,這意味著曲率很大。它們的大小也是有限度的,超過一個臨界點,結構就會崩塌。

「一方面,(薄層)是一個挑戰,因為你無法用此打造一個大的品質塊,」Montanyà說。「但另一方面,這也是一個好處,因為它可以讓你打造非常柔軟的彈簧。它縫隙非常小,且由於曲率很大,所以可視為一個挑戰,因此設計可能崩塌。但只要正確設計,它就會帶來好處,因為它能讓你檢測出小幅度的移動。如果縫隙更小,就能感測到更小的絕對位移。」

然後就是寄生電容。典型的MEMS設計有兩個裸晶,在ASIC裸晶和MEMS裸晶之間有引線鍵合。這樣會產生高達10皮法(pF)的寄生電容。將ASIC電路和MEMS電路放在同一個裸晶上,可以將寄生電容降低到100飛法(fF)左右(比典型的MEMS設計小2個數量級)。一些最新的MEMS產品也使用晶圓鍵合技術,透過將MEMS和ASIC更緊密地結合在一起來減少寄生電容,但Montanyà認為,Nanusens的元件相對來說仍更具有優勢。

他表示:「(競爭對手的寄生電容)比我們的要大一個數量級以上,因為我們的設計不需要跑到裸晶外面,即使它鍵合在頂部。在同一個晶片內工作是大幅降低寄生電容的唯一方法。」

智慧財產權(IP)

雖然Nanusens申請了它的IP專利,但這種結構的確切設計仍然是個秘密。Montanyà暗示這種結構與現有的MEMS元件非常不同。「在傳統的MEMS製程中,通常有三層。但是在CMOS製程中,有六個金屬層…因而我們有更多的設計選項,去做一些奇怪的事,」Montanyà說。

CMOS製程也為Nanusens提供了幾種參考材料:鋁、通孔用鎢和矽氧化物,這使得一些新穎的設計概念成為可能。Nanusens表示,CMOS MEMS元件還可以減少靜摩擦力(stiction)——當大多數MEMS加速度計受到極端外力時,這種靜摩擦力會阻止其工作。當品質塊接觸到被限制空間的邊緣時,靜摩擦力就會發生。分子力把它黏在牆上,這種作用是不可逆的,靜摩擦力取決於品質塊的表面積和撞擊能量。

Montanyà稱:「傳統的MEMS加速度計具有非常大的品質塊,以及1~2微米的間隙。由於我們的品質塊很小,間隙只有0.3微米,所以積累的能量較少,撞擊能量也較少。分離所需的力量也更小。」到目前為止測試的Nanusens加速度計樣品已經顯示出良好的對抗靜摩擦力效果,它們經受了超過10,000個開關迴圈的考驗,每一次都相當於1,000G。該公司稱,該測試樣品的靈敏度也比大多數應用所需的高出一個數量級

市場問題

Nanusens計畫將其技術應用於智慧型手機,但在過去的六個月裡,他們將目標改為無線耳機,因為他們認為該市場規模將擴張、增長更快。

入耳式無線耳機包含電池、揚聲器、麥克風和其他感測器,包括運動檢測器和慣性感測器。該運動檢測器具有兩個功能:可以檢測耳塞何時停用,並關閉耳塞以節省電力;還可以作為使用者介面實現點擊和按兩下動作。Nanusens預計在今年年底前推出運動檢測晶片的樣品。

耳塞中的慣性感測器作用在於,當我們說話時的耳骨振動,它都能檢測到。骨傳導感測器檢測這種振動,融合來自麥克風採集的資訊,進而協助抑制環境雜訊,Nanusens正在研發這種慣性感測器。

「我們可以把兩個感測器都做得更小,」Montanyà說。「現如今,每個晶片是4立方毫米。我們可以把這兩個感測器組合成一個1立方毫米多一點的晶片。這樣可以節省超過6立方毫米的空間,而且由於PCB面積的減少,實際上可以節省更多的空間。」他補充,在小小的耳塞裡,每立方毫米都有價值:節省下來的空間可以用於搭載更大的電池,更多的功能,更多的記憶體,或者只是讓耳塞變得更小更輕。

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圖中紅色高亮顯示部分為Nanusens NEMS感測器晶片佈局。兩個感測器佔據大約10%的晶片面積,每個結構的尺寸為100×150µm。(圖片來源:Nanusens)

隨著智慧型手機的耳機介面逐步淘汰,無線耳機市場將加速增長,未來的智慧型手機將配備無線耳機。「儘管這是一個巨大的市場,並且中國湧現出許多製造這些耳機的公司,但它們都使用參考設計(reference design)。」Montanyà說。「目前只有5家公司提供這些參考設計,我們正與這些公司洽談。他們喜歡減小感測器尺寸,並且等待(我們產品的)樣品融入他們的設計中。一旦我們打進一款這樣的參考設計,銷量將是巨大的。」

將公司的ASIC和MEMS IP整合到系統晶片(SoC)之中是下一個邏輯步驟,Nanusens已經與MCU製造商進行討論,因為在MCU中嵌入一個運動檢測器可以增加晶片級別的喚醒和休眠功能。Montanyà表示:「需要花一些時間才能看到這種整合如何完成,因為我們必須轉到更低的製程節點——這會很有意思,但我們還沒有走到這一步。首先我們要將產品推向市場,一旦產品得到實地驗證,那麼(整合)就會到來。」

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Josep montanyà,Nanusens執行長。(圖片來源:Nanusens)

儘管Nanusens打算最終將其技術延伸至更低的製程節點,但這項技術並不會像數位電路那樣明顯地帶來尺寸縮小。在較低的節點上建立一個所需大小的品質塊比較困難,但卻很有意思,例如將銅線切換至0.13微米節點,因銅的密度比鋁高,且它的導電性能也更好。

未來的產品還將包括溫度、濕度和壓力感測器,以及指南針和麥克風的設計。Nanusens追求的另一條產品路線是天線調諧器的電容式射頻(RF)開關。Montanyà表示:「我們預計(RF感測器)在長遠看來會發揮更大作用,好消息是我們正朝著這個方向努力。在世界行動通訊大會(MWC)期間,我們展示的一個產品,已引起大家的興趣。」

成本問題

是否所有這些設計都要比傳統的MEMS花費更高的成本?Montanyà將成本分為四部分:ASIC晶片、MEMS晶片、封裝、測試和校準,其中Nanusens的方案在ASIC晶片、測試和校準成本與傳統MEMS相同。取消獨立的MEMS晶片能夠節約成本,不過在ASIC晶片進行整合會增加15%的後端處理成本,但因為不需要多裸晶封裝(multi-die packaging),所以整體上能夠節省成本。總的來說,Nanusens生產的MEMS感測器本來就更便宜,對於感測器組合來說,其成本優勢變得更加明顯。

「單個感測器的成本優勢為30%。」Montanyà說。「如果我們整合更多感測器,可能會更多…在同一個晶片中添加另一個感測器可能會使CMOS面積增加10~20%,可能需要一個新的類比前端,但數位部分可以共用。與競爭對手添加新感測器時需要更多的裸晶、更多的引線鍵合等相比,整合感測器的成本優勢非常大。」

公司發展藍圖

通往目標的道路並不總是平坦。Montanyà之前的公司Baolab Microsystems,在2005年開始為CMOS製程後端設計MEMS結構。2012年,該公司即將推出其首款CMOS MEMS感測器——「羅盤(compass)」之際,一位主要投資者堅持要求在Baolab進入市場之前將其以高價出售。據Montanyà稱,這名投資者還拒絕了美國知名公司的投資提議;2014年,由於找不到買家,Baolab最終關門大吉。同年稍晚,Montanyà成立了Nanusens,並在2016年獲得了種子基金。

「Nanusens的三位創始人均來自Baolab Microsystems,」Montanyà表示,但該公司「花了兩年時間開展新設計,因為2012年的設計在2016年沒有意義…性能要求發生了變化。」2018年,該公司準備發佈慣性感測器之時,又由於其代工廠GlobalFoundries停產,再次遭遇挫折,且GlobalFoundries最終出售了MEMS晶圓廠,並完全放棄了MEMS業務。

但Nanusens並沒有退縮,而是重新設計了自己的元件。由於採用了超低漏電(ULL)製程,ASIC和MEMS設計都需要調整——這種0.18微米的CMOS製程已經不能與產業相容。最新的設計與標準CMOS製程相容,生產則已轉移到中芯國際,而台積電(TSMC)為第二選擇。

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內建在0.18微米CMOS中的2D運動感測器。(圖片來源:Nanusens)

這些主流晶圓代工廠可以提供批量生產能力,滿足快速增長的無線耳機市場。相比之下,傳統MEMS元件供應鏈需要專業的代工廠,因而無法快速擴張並滿足當前智慧型手機的市場需求。

鑒於Montanyà的經驗,他選擇限制個別風險投資公司的投資,以防止任何外部方持有公司大量股份,就不足為奇了。眾籌提供了一種便捷籌資方式,即從大量的小規模投資者(上一輪超過750個)那裡籌集到實現批量生產所需的資金。該公司迄今已透過這種方式募集了約200萬歐元,去年甚至將總部遷至倫敦,以鼓勵英國企業投資計畫(EIS)進行投資。據報導,上一輪融資籌集的資金超過目標金額的三倍。

隨著令人沮喪的商業問題最終得到解決,Nanusens可以繼續推進已經開發了14年的顛覆性創新技術。據悉,Nanusens用於耳機運動檢測的加速度計晶片樣品將在今年第四季提供。

(參考原文:MEMS in CMOS: An Impossible Dream?,by Sally Ward-Foxton)

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