儲存與運輸EUV倍縮光罩的挑戰

作者 : 英特格(Entegris)供稿

要以7奈米以下如此精細的尺寸穩定製作圖案,需要使用超潔淨倍縮光罩。

隨著半導體業界持續挑戰不斷縮減的設計尺寸,極紫外光(EUV)微影技術也於大量生產時擴大應用。針對7奈米以下的先進節點,EUV微影技術有助於簡化圖案成形製程。要以如此精細的尺寸穩定製作圖案,需要使用超潔淨倍縮光罩。

如同所有倍縮光罩一樣,運用在EUV微影技術上的倍縮光罩也須仰賴倍縮光罩傳送盒,以利安全存放,並於微影圖案成形、檢查、清潔與修復期間發揮保護作用。具備保護功能的傳送盒不僅應長年耐用,還要防止不必要的污染或實體損傷。

專為193奈米浸潤式微影技術所設計的傳送盒,仍不足以保護EUV倍縮光罩。由於EUV微影技術具有獨特要求,相應的傳送盒也應滿足額外的限制與需求,正因如此,EUV倍縮光罩傳送盒也成為講求高度專業且配備多項重要元件的設備。

本文將說明EUV微影傳送盒所面臨的設計挑戰,同時提供解決方案,以協助更多晶圓廠於旗下設施推行先進微影技術節點。

保護EUV倍縮光罩

微影圖案越精細,倍縮光罩污染的風險也越高。舉凡外來粉塵與化學殘留物,都是潛在的污染來源。倍縮光罩塗層具有精細與易於損壞等特點。無論是製程中的應有零件(例如晶圓廠的機械手臂),或是預期外的污染物(例如人體毛髮),只要有任何物件觸碰到倍縮光罩,都有可能造成損壞。

浸潤式微影技術需要使用光罩防塵薄膜做為「防塵罩」,以防倍縮光罩於圖案曝光期間受到粉塵污染。光罩防塵薄膜需要具備光透性,而在EUV微影技術應用上,則需讓光線得以穿透波長約13.5奈米的EUV光譜。多數現有的光罩防塵薄膜材質都會吸收EUV光線,但半導體業界正著手推行EUV專用的光罩防塵薄膜(圖1)。

20191216TA31P1
圖1 將光罩防塵薄膜整合於EUV倍縮光罩中。(資料來源:Carmen Zoldesi 9048-581)

在光罩防塵薄膜成為EUV微影技術的標準配備之前,業界仍需使用EUV傳送盒來保護不含光罩防塵薄膜的倍縮光罩。適用於EUV微影技術的NXE機台需採用雙層傳送盒配置:內側的金屬傳送盒需處於真空狀態,外側傳送盒則會接觸周圍環境。只有當傳送盒位於機台內部時,內側傳送盒才會開啟。

鑑於雙層傳送盒配置已成為EUV微影技術的標準措施,而市面上也出現多款此類傳送盒。然而,這並不表示此類傳送盒足以稱為「商業成品」。畢竟,EUV傳送盒的設計(圖2)必須持續進化,才能滿足效能需求與微影技術產能。

20191216TA31P2
圖2 EUV 微影技術的雙層傳送盒配置,左側為外側傳送盒,右側為內側傳送盒。

儘管雙層傳送盒配置可發揮保護作用,發生污染的可能性依舊不容小覷。基於此一原因,設計EUV傳送盒時,需要將污染風險納入考量。尤其是如果倍縮光罩不含光罩防塵薄膜,內側傳送盒將同時成為主要保護方式與潛在污染的主要來源。

傳送盒的設計考量,應涵蓋內外側傳送盒的幾何體, 以及各自採用的材質。

材質潔淨度

接觸或包圍倍縮光罩的所有表面(包括傳送盒的表面),都必須保持超潔淨狀態,以免導入不必要污染物,例如粉塵或藉由空氣傳播的化學氣體。

揮發氣體的聚合物會產生不必要的化學品污染,並沉積於倍縮光罩表面上。因此,傳送盒應當使用適當的材質,盡可能避免氣體揮發時所造成的影響。內側傳送盒會以金屬材質製成,不會揮發任何氣體。然而,外側傳送盒則如同非UV微影技術所使用的單一倍縮光罩傳送盒一樣,會以聚合物為主。

由於設計尺寸不斷縮減,打造零污染環境的重要性也與日俱增。畢竟,即使微不足道的污染粉塵,都有可能影響到圖案移轉的準確度,並造成良率損失。

確保機械性防護能力

在晶圓廠內部或是設施之間,例如透過空運或陸運等方式,從光罩製作廠運送至整合元件製造商(IDM)的運送過程中,傳送盒都需安全地包覆倍縮光罩。此一保護機制,需要在「保護傳送盒內的倍縮光罩」,以及「盡可能避免過大的接觸力道造成機械性損害」間取得巧妙平衡。如果抑制力過低,倍縮光罩將無法承受運輸期間的機械性加速與振動,並產生損傷。

然而,若觸針的抑制力過大,則會在倍縮光罩上形成過度接觸的痕跡。當倍縮光罩邊緣的玻璃被刮下時,玻璃粉塵將形成污染物,且可能造成微影瑕疵。從粉塵產生的觀點來看,接觸力道應越低越好。

在傳送盒能有效固定倍縮光罩,使其維持穩定的前提下,只要接觸點越少,傳送盒造成粉塵污染的機率也會隨之降低。此外,接觸點大小也十分重要。當傳送盒關閉時,較大的接觸區域將產生較小的接觸壓力。

若要盡可能減少接觸痕跡,選用的傳送盒材質也是一大關鍵。在倍縮光罩就定位與傳送盒開關期間,理想的傳送盒材質可望發揮防刮效果。

傳送盒吹淨

如需去除內部濕氣,並讓倍縮光罩維持潔淨、乾燥,就必須定期吹淨外側傳送盒。無論所使用的吹淨氣體為超潔淨乾空氣(XCDA)還是氮氣,都會透過進氣口進入外側傳送盒內。

雖然吹淨期間的多數氣體交換會發生在外側傳送盒內,在NXE機台內進行吹淨或真空抽氣與排氣時,部分氣體也會流入或流出內側傳送盒。內側傳送盒配備整合式過濾器,可交換氣體分子,並盡可能減少侵入內側傳送盒的粉塵。當內側傳送盒關上時,需要進行密封,以透過過濾器(而非密封處的任何空隙)進行所有氣體交換。

如果設計得當,過濾器的傳導性(用來測量氣體流經過濾器的能力)應遠大於密封的傳導性。如此一來,進入內側傳送盒的90%以上氣體都會經由過濾器導入。

內側傳送盒內的過濾器必須要有足夠的透氣性,以導入足夠的氣流,同時也得具備足以承受清潔程序的耐用度。唯有仔細挑選過濾器材質與幾何體,才能在兩者之間取得適當平衡。當粉塵穿越上蓋與基板之間的密封處進入倍縮光罩時,倍縮光罩與基板之間的間隙尺寸越小,越有可能確保粉塵停留在倍縮光罩的外側邊緣,而非轉移至可能造成良率損失的作用區中(圖3)。

20191216TA31P3
圖3 粉塵落於倍縮光罩與內側傳送盒基板之間的間隙內。

設備相容性

微影製程多已自動化,而負責處理傳送盒的機械手臂,往往不容許過多的傳送盒尺寸誤差。除了尺寸誤差空間不大,傳送盒也要與標準的機械介面相容。由於傳送盒的使用壽命為7~10年,新的設備需要向下相容既有的傳送盒。

在預期使用壽命較長的情況下,意味著傳送盒需要於多年內承受數千次的開關週期。若能使用抗磨損材質,不僅能將粉塵污染降至最低,還可延長傳送盒的使用壽命。

倍縮光罩傳送盒的光學視窗,必須與自動化設備相容。微影機的攝影機需要檢視傳送盒內部,才能適當偵測倍縮光罩,正因如此,傳送盒視窗的反射率與平坦度須符合嚴格的要求。

容納光罩防塵薄膜

在預期使用壽命較長的情況下,倍縮光罩傳送盒需滿足現行與未來的EUV微影技術需求。正因如此,目前的傳送盒設計人員,應當規劃一款可容納光罩防塵薄膜的版本,以及一款不含光罩防塵薄膜的版本。如此一來,即可在符合傳送盒整體大小與重量需求的情況下,透過加入光罩防塵薄膜套來改良內側傳送盒。

設計出相容於光罩防塵薄膜的傳送盒,需仰賴傳送盒廠商、光罩防塵薄膜供應商與微影機製造商的密切合作。自動化設備僅能承受有限範圍的內側傳送盒重量,這表示,為容納光罩防塵薄膜套而減少的材質的重量,必須加諸於傳送盒中的其他處。安排內側傳送盒中的接觸點與視窗時,也應考量光罩防塵薄膜的幾何體。

光罩防塵薄膜相當脆弱。微影作業期間的真空抽氣與排氣,都會於內側傳送盒中造成壓力變化。此一壓差必須控制在特定閥值之內,以防光罩防塵薄膜因過度偏差而損壞。在相容於光罩防塵薄膜的內側傳送盒內適當配置視窗,有助於提供能見度,繼而讓微影機偵測到光罩防塵薄膜損壞。

EUV機台必須有能力處理包含或不含光罩防塵薄膜的倍縮光罩,並識別兩種類型。如果不小心將含有光罩防塵薄膜的倍縮光罩置入不含光罩防塵薄膜套的傳送盒中,將對光罩防塵薄膜造成永久的損壞。內側傳送盒應整合各項設計功能,讓EUV機台內部的攝影機能進行掃描,以透過光學技術判斷傳送盒類型,從而降低誤判傳送盒的風險。

EUV倍縮光罩傳送盒不僅為高度專業的設備,更於EUV微影技術中扮演著極為重要的角色。它們必須在使用、存放與運輸期間發揮保護倍縮光罩的作用,同時防止額外的污染或損傷。傳送盒必須與微影設備相容,並讓倍縮光罩保持在潔淨、乾燥的環境。而精心設計的雙層傳送盒配置,能同時讓包含與不含光罩防塵薄膜的倍縮光罩達成上述目標,以跟上未來的EUV微影技術發展腳步。

本文同步刊登於EE Times Taiwan 12月號雜誌

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